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Updated: Jul 1, 2025
08:04
Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography
Published on: March 12, 2017
9.3K
Influence of the Emitter Shape on the Field-of-View in Atom Probe Tomography
Masoud Dialameh1, Yu-Ting Ling2, Janusz Bogdanowicz1
1Imec, Kapeldreef 75, 3001 Leuven, Belgium.
Summary
Atom probe tomography (APT) analysis can be distorted by specimen shape. This study shows how asymmetric emitter shapes affect the field-of-view (FOV) and spatial accuracy in 3D elemental mapping.
Area of Science:
- Materials Science
- Analytical Chemistry
- Physics
Background:
- Atom probe tomography (APT) provides high-resolution 3D elemental mapping.
- Specimen shape deviations from ideal hemispheres can cause artifacts in APT reconstructions.
- The impact of emitter shape evolution on the field-of-view (FOV) in APT is not well understood.
Purpose of the Study:
- To investigate the field-of-view (FOV) for asymmetric emitters in APT.
- To analyze the evolution of FOV throughout the depth of analysis.
- To understand how emitter shape affects spatial accuracy in APT.
Main Methods:
- Numerical simulations of ion trajectories.
- Experimental APT analysis of asymmetric specimens.
- Analysis of field-of-view (FOV) location and evolution.
Main Results:
- Ions from the summit of asymmetric emitters project towards the detector center.
- The FOV center can deviate from the specimen's central axis.
- FOV location evolves with changes in emitter shape during analysis.
Conclusions:
- Specimen shape is critical for accurate APT reconstructions.
- Accounting for emitter shape evolution is essential for advanced reconstruction algorithms.
- Improved understanding of FOV dynamics enhances spatial accuracy in APT data.
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