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Directional Multi-Resonant Micro-Electromechanical System Acoustic Sensor for Low Frequency Detection.

Justin Ivancic1, Fabio Alves1

  • 1Department of Physics, Naval Postgraduate School, Monterey, CA 93943, USA.

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Summary

This study presents a novel multi-resonant MEMS acoustic sensor with enhanced bandwidth and signal-to-noise ratio (SNR) for improved sound source detection. The advanced design overcomes limitations of traditional single-resonator sensors.

Keywords:
MEMS acoustic sensordirectional acoustic sensormulti-resonant acoustic sensorunderwater acoustic sensor

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Area of Science:

  • Acoustic Engineering
  • MEMS Technology
  • Sensor Design

Background:

  • Traditional resonant Micro-Electro-Mechanical Systems (MEMS) sensors offer high sensitivity but limited bandwidth.
  • Detecting and tracking sound sources with broad acoustic signatures requires sensors with wider operational frequency ranges.
  • Existing MEMS acoustic sensors often face a trade-off between sensitivity and bandwidth.

Purpose of the Study:

  • To design, model, and characterize a multi-resonant MEMS acoustic sensor.
  • To broaden the usable bandwidth of MEMS acoustic sensors while maintaining a high signal-to-noise ratio (SNR).
  • To improve the detection and tracking capabilities for sound sources with non-tonal acoustic signatures.

Main Methods:

  • Utilized a multi-resonant design approach building upon previous MEMS sensor architectures.
  • Conducted in-air characterization in an anechoic chamber.
  • Performed underwater characterization in a semi-anechoic pool and a standing wave tube.

Main Results:

  • The multi-resonant MEMS acoustic sensor demonstrated cosine-like directionality.
  • Achieved a maximum acoustic sensitivity of 47.6 V/Pa.
  • Recorded a maximum signal-to-noise ratio (SNR) of 88.6 dB over a 100 Hz-3 kHz bandwidth.

Conclusions:

  • The multi-resonant design significantly enhances MEMS acoustic sensor performance compared to single-resonator designs.
  • This sensor overcomes the typical sensitivity-bandwidth trade-off, enabling broader applications.
  • The improved sensor is well-suited for detecting and tracking diverse acoustic signatures.