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Iterative control decoupling tuning for precision MIMO motion systems: A matrix update method.

Hongyang Zhao1, Yu Wan2, Li Li2

  • 1Center of Ultra-precision Optoelectronic Instrument Engineering, Harbin Institute of Technology, Harbin 150080, China; Key Lab of Ultra-precision Intelligent Instrumentation (Harbin Institute of Technology), Ministry of Industry and Information Technology, Harbin 150080, China; Department of Control Science and Engineering, Harbin Institute of Technology, Harbin 150080, China.

ISA Transactions
|October 22, 2024
PubMed
Summary
This summary is machine-generated.

This study introduces a new iterative tuning method for control decoupling in precision Multi-Input-Multi-Output (MIMO) systems. The method enhances decoupling performance by updating control matrices using feedback signals, improving system accuracy.

Keywords:
Control decouplingIterative learning controlIterative tuningMIMO motion systems

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Area of Science:

  • Control engineering
  • Precision motion systems
  • Mechatronics

Background:

  • Precision Multi-Input-Multi-Output (MIMO) motion systems require control decoupling for independent control of each Degree of Freedom (DOF).
  • Manufacturing tolerances and assembly errors lead to inaccuracies in the Center of Gravity (CoG) and actuator positions, degrading nominal control decoupling matrix performance.

Purpose of the Study:

  • To develop an iterative control decoupling tuning method that addresses inaccuracies in the control decoupling matrix.
  • To improve the decoupling performance of precision motion systems despite model uncertainties.

Main Methods:

  • A novel matrix update based iterative control decoupling tuning method is proposed.
  • The method utilizes feedback control signals for accurate tuning.
  • Rigid-body model information is employed to construct accurate basis functions for faster tuning, particularly at lower control bandwidths.

Main Results:

  • The matrix update method significantly improves control decoupling performance.
  • Experimental results show a substantial reduction in servo error (e.g., peak Rx-DOF error reduced from 1.29 × 10⁻⁵ m to 3.19 × 10⁻⁶ m) after only two tuning trials.
  • The method enhances the dynamics of the logical controlled plant without increasing control complexity.

Conclusions:

  • The proposed matrix update based iterative tuning method effectively enhances control decoupling performance in precision MIMO motion systems.
  • This approach offers improved robustness to model inaccuracies compared to feedforward compensation methods.
  • The method is validated through experimental results on a critical subsystem for lithographic projection lens testing systems.