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Ballistic transport in sub-10 nm monolayer InAs transistors for high-performance applications
Tianruo Xie1, Yuliang Mao1,2
1School of Physics and Optoelectronics, Xiangtan University, Xiangtan 411105, China. ylmao@xtu.edu.cn.
Physical Chemistry Chemical Physics : PCCP
|November 11, 2024
Summary
Monolayer InAsH2 MOSFETs show excellent performance for future electronics. Optimized doping and underlap meet semiconductor roadmap requirements down to 4.0 nm gate lengths.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Semiconductor Physics
Background:
- Indium arsenide (InAs) is a 2D semiconductor with high electron mobility, promising for advanced electronic and optical devices.
- Recent advancements have enabled the preparation of 2D InAs with thicknesses as low as 4.8 nm.
Purpose of the Study:
- To investigate the ballistic transport characteristics of sub-10 nm monolayer InAs (InAsH2) metal-oxide-semiconductor field-effect transistors (MOSFETs).
- To evaluate the performance metrics including on-state current, subthreshold swing, intrinsic delay time, and power consumption.
Main Methods:
- Utilized *ab initio* quantum transport simulations.
- Systematically analyzed the impact of doping concentration, underlap, and high-κ dielectric effects.
Main Results:
- Monolayer InAsH2 MOSFETs demonstrate excellent performance, meeting International Technology Roadmap for Semiconductors (ITRS) requirements for gate lengths down to 4.0 nm.
- Optimized doping and underlap significantly enhance device performance.
- The integration of high-κ dielectrics further improves on-state current and subthreshold swing.
Conclusions:
- Monolayer InAsH2 is a highly promising channel material for next-generation high-performance semiconductor devices.
- The study provides critical insights into optimizing 2D InAs MOSFETs for future electronic applications.

