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IR Spectrometers

IR Spectrometers

There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...

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Related Experiment Video

Updated: May 24, 2025

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

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Published on: December 27, 2012

Experimental Study of Spectrally Selective MEMS/Metasurface Infrared Detectors.

Melisa Ekin Gülseren¹, Matthew Benson¹, Ryan W Parker¹

¹Electrical and Computer Engineering Department, University of California, Davis, CA 95616 USA.

IEEE Sensors Journal

|March 3, 2025

Summary

This summary is machine-generated.

Researchers developed uncooled infrared (IR) detectors using aluminum nitride contour mode resonators and metasurfaces, achieving record low noise equivalent power (NEP) for enhanced thermal imaging. These advanced IR detectors offer improved performance for various applications.

Keywords:

Aluminum nitride (AlN)infrared (IR) detector metasurface microelectromechanical system (MEMS) resonator perfect material absorber

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Area of Science:

Physics
Materials Science
Electrical Engineering

Background:

Uncooled infrared (IR) detectors are crucial for thermal imaging but often face limitations in sensitivity and spectral selectivity.
Aluminum nitride (AlN) contour mode resonators (CMRs) offer a promising platform for sensitive detection due to their high quality factors.
Integrating spectrally selective IR metasurfaces can enhance the performance and tunability of IR detectors.

Purpose of the Study:

To perform a comprehensive statistical analysis of uncooled IR detectors.
To report the lowest noise equivalent power (NEP) achieved with AlN CMRs integrated with IR metasurfaces.
To establish guidelines for developing quasi-optimal spectrally selective IR sensors.

Main Methods:

Fabrication of spectrally selective IR metasurfaces on AlN CMRs using optical lithography.
Integration of metasurfaces to decouple mechanical, radio frequency (RF), and IR responses.
Automated characterization of hundreds of IR sensors to record quality factor, noise, and responsivity.

Main Results:

Achieved the lowest NEP recorded for these types of devices, approximately 11 pW/√Hz.
Demonstrated quasi-optimal IR detectors with NEP in the pW/√Hz range and responsivities in the Hz/nW range.
Identified trends between parameters like quality factor, noise floor, NEP, and responsivity.

Conclusions:

The developed approach enables the fabrication and characterization of highly sensitive, spectrally selective IR detectors.
Statistical analysis provides valuable insights for optimizing IR detector design for room-temperature operation.
This work paves the way for advanced, cost-effective IR sensing technologies.