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Automatic Mode-Matching Method for MEMS Gyroscope Based on Fast Mode Reversal.

Feng Bu¹, Bo Fan², Rui Feng³

¹School of Electronic and Information Engineering, Suzhou Vocational University, Suzhou 215104, China.

|June 27, 2025

Summary

This summary is machine-generated.

This study introduces an automatic mode-matching technique for microelectromechanical system disk resonator gyroscopes (MEMS DRGs). The method rapidly aligns resonant frequencies, enhancing gyroscope sensitivity and stability.

Keywords:

MEMS disk resonator gyroscope fast mode reversal force to rebalance mode-matching

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Area of Science:

* Mechanical Engineering
* Electrical Engineering
* Sensor Technology

Background:

* Asymmetric stiffness in microelectromechanical system disk resonator gyroscopes (MEMS DRGs) due to processing errors leads to mode mismatch.
* This mismatch degrades mechanical sensitivity and the stability of the closed-loop scale factor, impacting gyroscope performance.
* Accurate mode matching is crucial for high-precision gyroscope operation.

Purpose of the Study:

* To develop an automatic mode-matching method for MEMS DRGs.
* To improve gyroscope sensitivity and closed-loop scale factor stability by addressing mode mismatch.
* To obtain the true resonant frequency of the gyroscope's operating state for precise matching.

Main Methods:

* Implementation of a gyroscope control system with drive, force-to-rebalance (FTR), and quadrature error correction closed loops.
* Utilizing mode reversal to obtain true resonant frequencies of the x- and y-axes via a phase-locked loop (PLL).
* Automatic adjustment of the x-axis tuning voltage to match the resonant frequencies of both axes.

Main Results:

* The automatic mode-matching method executes in just 5 seconds.
* Achieves a high frequency matching accuracy of 0.01 Hz.
* Maintains stable matching across a temperature range of -20 to 60 °C with frequency split fluctuations not exceeding 0.005 Hz.

Conclusions:

* The proposed automatic mode-matching method effectively resolves mode mismatch in MEMS DRGs.
* The technique significantly enhances gyroscope sensitivity and scale factor stability.
* Demonstrates rapid execution, high accuracy, and robust performance across varying temperatures.