Switchable high-Q and high-sensitivity nanoscale MIM waveguide-based biaxial optical accelerometer.

Area of Science:

• Photonics and Nanotechnology
• Optical Sensing
• Inertial Measurement

Background:

• Metal-insulator-metal (MIM) waveguides offer high sensitivity and electromagnetic interference immunity for inertial sensing.
• Current challenges include achieving multi-axis detection, miniaturization, and high performance simultaneously in optical accelerometers.

Purpose of the Study:

• To propose and theoretically investigate a novel dual-axis optical accelerometer.
• To achieve switchable sensing along orthogonal directions within a compact MIM structure.

Main Methods:

• Integration of a circular-shaped ring resonant cavity (CSRRC) and a square-shaped ring resonant cavity (SSRRC) within a MIM structure.
• Utilizing finite element simulations to analyze device performance and the influence of structural parameters.
• Employing a composite configuration with orthogonally embedded resonators for independent detection.

Main Results:

• Achieved a high Q-factor of 68.81 along the x-axis and a sensitivity of 0.102 nm/g along the y-axis.
• Demonstrated independent detection over a range of -20g to 20g with improved sensitivity and transmission.
• CSRRC enhances field confinement for x-axis sensing; SSRRC boosts y-axis sensitivity via coupling with a proof mass.

Conclusions:

• The proposed dual-axis optical accelerometer design offers a pathway to highly integrated, high-performance inertial sensing.
• The novel integration of CSRRC and SSRRC enables switchable, multi-directional detection.
• Potential applications include industrial monitoring, UAV navigation, and biomedical devices.