Ultrahigh-temperature vacuum prober for electrical and thermal measurements

Area of Science:

• Materials Science
• Thermal Analysis
• Electrical Characterization

Background:

• Accurate characterization of material properties at high temperatures is crucial for advanced applications.
• Existing methods often face limitations in simultaneous electrical and thermal measurements under extreme conditions.

Purpose of the Study:

• To develop and validate an ultrahigh-temperature vacuum probe station (UHT-VPS) for simultaneous electrical and thermal property measurements.
• To demonstrate the system's capability in measuring properties of bulk sapphire and thin-film micro-resistances.

Main Methods:

• Utilized a contactless sample holder heated by thermal radiation from a silicon carbide heater within a vacuum environment.
• Employed the 3ω/2ω method for electrical signal measurements from 30 nV upwards.
• Recorded heater and sensor temperature signals up to 30 kHz for data analysis.

Main Results:

• Successfully operated the UHT-VPS from 300 K to 1150 K under high vacuum (2 × 10-6 mbar) for 66 hours continuously.
• Determined linear and quadratic temperature coefficients of resistance for chromium/platinum micro-resistances.
• Measured the thermal conductivity and thermal diffusivity of bulk sapphire, with thermal conductivity values not accessible by optical methods.

Conclusions:

• The UHT-VPS provides an effective solution for simultaneous electrical and thermal property retrieval of materials at unprecedented temperature levels.
• The system's ability to perform long-term, stable measurements under extreme conditions validates its utility in materials research.