Influence of Design Parameters of Membrane-Type Flow Controller on Bearing Characteristics of Hydrostatic Guideways

The hydrostatic guideway has been widely used in ultra-precision machine tools. The flow stability of the hydrostatic guideway has a significant impact on its bearing characteristics, and the flow controller is critical to safeguard the flow stability of the hydrostatic guideway. Currently, most engineering applications use fixed, fluid-resistance flow controllers, which have a simple structure, low cost, and high reliability. However, when facing complex working conditions, the fixed, fluid-resistance flow controller cannot maintain the flow stability of the hydrostatic guide. In this study, a membrane-type flow controller with variable fluid resistance is designed, and a theoretical model of the flow controller's bearing characteristics is established, which is verified by fluid-solid coupling simulation and flow rate experiments. Analyzing the influence of the design parameters of the membrane-type flow controller on the performance according to the theoretical model, the design guidelines of the membrane-type flow controller are established, the key structure of the flow controller is clarified, and the design range of the key structure dimensions is given. The results show that the gasket thickness of the membrane-type flow controller has the greatest impact on the performance of the hydrostatic guideways, which should be ensured to have a machining error of less than 0.005 mm. This study is a guide for the design and manufacture of flow controllers, as well as for engineering applications.