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Updated: Jan 18, 2026

Fabrication and Testing of Microfluidic Optomechanical Oscillators
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Intermodal microwave-to-optical transduction using silicon-on-sapphire optomechanical ring resonator.

I-Tung Chen1, Nicholas S Yama1, Haoqin Deng1

  • 1Electrical and Computer Engineering Department, University of Washington, Seattle, WA 98105, USA.

Science Advances
|September 10, 2025
PubMed
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This summary is machine-generated.

We developed an unsuspended optomechanical ring resonator for efficient quantum microwave-to-optical transduction. This silicon-on-sapphire platform overcomes thermal limitations, enabling scalable quantum systems and advanced optomechanical circuitry.

Area of Science:

  • Quantum optics
  • Optomechanics
  • Solid-state physics

Background:

  • Optomechanical and electro-optomechanical systems are key for quantum transduction.
  • Suspended designs limit efficiency due to poor heat dissipation.
  • Interconnecting quantum modalities requires efficient microwave-to-optical conversion.

Purpose of the Study:

  • To demonstrate an unsuspended optomechanical ring resonator (OMR) for microwave-to-optical frequency conversion.
  • To address thermal limitations in suspended optomechanical systems.
  • To present a silicon-on-sapphire (SOS) platform compatible with superconducting qubits.

Main Methods:

  • Fabrication of an unsuspended optomechanical ring resonator on a silicon-on-sapphire platform.
  • Utilizing triply resonant optical-to-optical conversion.

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  • Characterizing enhanced coupling rates and conversion efficiencies under microwave and optical drive powers.

    • Main Results:

    • Achieved an enhanced coupling rate (Gb) of 3.6 GHz/√mW.
    • Demonstrated a peak conversion efficiency of 1.2% with 3.6 mW microwave drive power.
    • Obtained a microwave-to-optical conversion efficiency of 1.5 × 10⁻⁵ at 10 mW optical drive power.

    Conclusions:

    • The unsuspended SOS platform effectively mitigates thermal effects.
    • This platform is compatible with superconducting qubits, crucial for quantum computing.
    • The demonstrated OMR is a promising platform for optomechanical circuitry and quantum transduction.