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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
A compact, all-digital microwave impedance microscopy system with automatic baseline cancellation
Adam Pierce1, Amogh Yogesh Waghmare1, Eric Y Ma1,2,3
1Department of Physics, University of California, Berkeley, California 94720, USA.
We developed a compact, digitally controlled microwave impedance microscopy (MIM) system. Its advanced cancellation technology significantly reduces noise, improving sensitivity for detailed nanoscale imaging.
Area of Science:
- Nanoscience and Nanotechnology
- Electrical Engineering
- Materials Science
Background:
- Microwave impedance microscopy (MIM) is a powerful technique for nanoscale electrical characterization.
- Existing MIM systems can be limited by noise and baseline reflections, particularly at low frequencies or high power.
- Digital control and advanced signal processing offer potential improvements in MIM performance.
Purpose of the Study:
- To present a compact, fully digitally controlled microwave impedance microscopy (MIM) system.
- To enhance MIM sensitivity and reduce noise through a novel digital cancellation technique.
- To demonstrate the system's capability for high-quality nanoscale imaging.
Main Methods:
- Implementation of a modular, surface-mount platform for the MIM system.
- Development of a high-resolution, digitally tunable cancellation line utilizing destructive interference.
- Application of a physics-informed cancellation algorithm for rapid, automated noise minimization.
- Utilizing a quasi-DC-coupled readout for contact- and tapping-mode imaging.
Main Results:
- The system achieves efficient suppression of baseline reflections, significantly reducing noise.
- A physics-informed algorithm minimizes residual power within seconds, eliminating manual adjustments.
- The system demonstrates high-quality MIM scans with a near-Johnson-noise-limited floor down to 4 kHz.
- Quasi-DC-coupled readout prevents saturation in both contact and tapping modes.
Conclusions:
- The developed compact, digitally controlled MIM system offers enhanced sensitivity and reduced noise.
- The digital cancellation line and algorithm provide a robust solution for challenging MIM measurements.
- This system enables high-fidelity nanoscale electrical characterization across various imaging modes.
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