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Thermal Gas Flow Sensor Using SiGe HBT Oscillators Based on GaN/Si SAW Resonators.

Wenpu Cui1, Jie Cui1, Wenchao Zhang1

  • 1School of Integrated Circuits and Beijing National Research Center for Information Science and Technology (BNRist), Tsinghua University, Beijing 100084, China.

Micromachines
|October 29, 2025
PubMed
Summary
This summary is machine-generated.

This study introduces a novel thermal gas flow sensing system using a surface acoustic wave (SAW) temperature sensor and a high-frequency oscillator. The integrated system achieves accurate, non-contact flow measurement with excellent dynamic response and repeatability.

Keywords:
GaNSAWSiGe HBTgas flow sensorthermal

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Area of Science:

  • Materials Science
  • Electrical Engineering
  • Sensor Technology

Background:

  • Accurate gas flow measurement is crucial in various industrial applications.
  • Existing flow sensors often face limitations in terms of accuracy, response time, or lifespan.
  • Miniaturization and integration of sensing components are key trends in modern sensor development.

Purpose of the Study:

  • To develop and present a miniaturized, integrated thermal gas flow sensing system.
  • To utilize a surface acoustic wave (SAW) temperature sensor for precise temperature monitoring within the flow system.
  • To achieve high-performance, non-contact gas flow measurement.

Main Methods:

  • Fabrication of a single-port Gallium Nitride on Silicon (GaN/Si) SAW resonator.
  • Construction of a temperature-sensitive high-frequency oscillator using a Silicon-Germanium Heterojunction Bipolar Transistor (SiGe HBT).
  • Implementation of a dual-oscillation configuration and modular integration for system-level flow measurement.

Main Results:

  • The SAW device exhibited a temperature coefficient of frequency (TCF) of -28.29 ppm/K with high linearity (0.998).
  • The oscillator operated at 1.91 GHz with good phase noise characteristics.
  • The system demonstrated accurate measurement of 0-50 standard cubic centimeters per minute (sccm) flows with <1 s response time and <0.9% error, extendable to higher ranges using a shunt technique.

Conclusions:

  • The developed thermal gas flow sensing system offers high stability, long lifespan, and excellent performance.
  • The non-contact operation and modular design ensure broad application prospects in gas flow measurement.
  • The integration of SAW resonator and SiGe HBT oscillator provides a robust platform for advanced flow sensing.