Monolithically integrated triaxial high-performance high-g accelerometer for high shock vibration signal measurements

High-g accelerometers serve as critical components in real-time monitoring systems for shock vibration analysis of blast fuzes in both penetrating and hypersonic weapon applications. While piezoresistive accelerometers can theoretically achieve both high sensitivity and broad frequency response when the piezoresistive beam (piezoresistor) undergoes pure axial deformation, previous approaches required intricate theoretical calculations and specific structural configurations to approximate pure axial deformation conditions, substantially complicating the design process. This study presents an innovative triaxial high-g piezoresistive accelerometer design featuring position-independent pure axial deformation of the piezoresistive beam, capable of measuring accelerations up to 200,000 g. The key innovation lies in the synchronized deformation mechanism at both ends of the piezoresistive beam, which effectively cancels out transverse deformation components. This novel approach eliminates the need for complex design procedures while ensuring pure axial deformation throughout the measurement range. Experimental validation demonstrates exceptional performance characteristics: an ultra-high natural frequency exceeding 1.5 MHz coupled with high sensitivity greater than 1.15 μV/g at 5 V excitation, which provides a convenient method for the design of high-performance piezoresistive accelerometers.