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Development of 3D-Stacked 1Megapixel Dual-Time-Gated SPAD Image Sensor with Simultaneous Dual Image Output

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This study presents a novel 1-megapixel dual-time-gated SPAD image sensor for efficient sensor fusion. The sensor achieves simultaneous dual image output, enabling RGB-Depth sensing and high dynamic range imaging.

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Area of Science:

  • Photonics and Imaging Technology
  • Computational Imaging
  • Sensor Fusion

Background:

  • Sensor fusion is vital for imaging applications but faces computational challenges due to data integration from diverse sensors.
  • Existing time-gated single-photon avalanche diode (SPAD) sensors mitigate some issues but struggle with mismatched frame timing.
  • Previous dual-time-gated SPAD sensors had limitations like large pixel pitch, low resolution, and restricted exposure control.

Purpose of the Study:

  • To introduce a high-performance dual-time-gated SPAD image sensor.
  • To enable simultaneous dual image capture with synchronized timing, field-of-view, and resolution.
  • To validate its application in RGB-Depth sensing and high dynamic range imaging.

Main Methods:

  • Development of a 5 µm-pitch, 3D-backside-illuminated (BSI) 1-megapixel dual-time-gated SPAD image sensor.
  • Implementation of a novel high dynamic range (HDR) technique using in-pixel memories and pileup effect.
  • Verification of simultaneous dual image output without complex alignment.

Main Results:

  • The sensor successfully operates as an RGB-Depth sensor, simplifying sensor fusion.
  • A dynamic range of 119.5 dB was achieved using the novel HDR technique.
  • The developed sensor provides dual images with identical field-of-view, resolution, and frame timing.

Conclusions:

  • The proposed dual-time-gated SPAD image sensor architecture offers efficient sensor fusion capabilities.
  • Its ability to output synchronized dual images overcomes previous limitations.
  • This technology holds significant promise for advanced imaging and sensing systems.