Mm-Wave CMOS Biosensor With Integrated Dielectrophoresis for Single-Cell Detection and Characterization

This paper presents an injection-locked voltage-controlled oscillator-based sensing platform capable of detecting and characterizing single mammalian cells at 114GHz. The sensor is equipped with on-chip Dielectrophoresis (DEP) force generators that focus and align the sample with the sensor, maximizing the sensitivity and repeatability of the measurements. The chip, fabricated in a bulk 28nm CMOS technology, is packaged with microfluidics using a single-mask lithography technique that enables continuous sample delivery, measurement, and removal. The platform is demonstrated in differentiating various materials, three cell lines (HeLa GFP, HCT-116, SK-MEL-28), and, most importantly, the growth and mitotic states of a single cell line. These unique capabilities establish a foundation for streamlining cell-based assays and enabling real-time monitoring of drug-cell interactions.