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Related Experiment Video

Updated: Jan 8, 2026

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings

High-resolution Thermal Micro-imaging Using Europium Chelate Luminescent Coatings

Published on: April 16, 2017

Material-Sensitive and Thickness-Resolved Transmission Imaging Using Coherent Extreme Ultraviolet Radiation.

Fengling Zhang¹, Xiaomeng Liu¹, Antonios Pelekanidis¹

¹Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands.

|December 22, 2025

Summary

This summary is machine-generated.

High-harmonic generation (HHG) enables advanced extreme ultraviolet (EUV) microscopy for nanostructure analysis. Lensless imaging techniques accurately map material composition and layer thickness in complex samples.

Keywords:

computational imaging diffractive shearing interferometry extreme ultraviolet coherent diffractive imaging high-harmonic generation ptychography

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High-Throughput Total Internal Reflection Fluorescence and Direct Stochastic Optical Reconstruction Microscopy Using a Photonic Chip

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Area of Science:

Physics
Materials Science
Nanotechnology

Background:

Extreme ultraviolet (EUV) microscopy offers high resolution and material contrast due to short wavelengths and element-specific absorption edges.
Table-top high-harmonic generation (HHG) sources provide broad EUV and soft X-ray spectra ideal for nanostructure characterization.
Lensless coherent diffraction imaging methods overcome challenges of EUV lens-based imaging, enabling quantitative phase measurements.

Purpose of the Study:

To perform spectrally resolved lensless imaging of a dispersive sample using multiple HHG-based measurement concepts.
To characterize the structure and composition of a three-element spiral-shaped object.
To compare the accuracy of different lensless imaging techniques for material analysis.

Main Methods:

Multiwavelength diffractive shearing interferometry.
Single-wavelength structured-illumination ptychography.
Utilizing multiple high harmonics from HHG sources for spectrally resolved imaging.

Main Results:

Both diffractive shearing interferometry and ptychography successfully retrieved spatially resolved element maps and layer thicknesses.
Ptychography demonstrated superior accuracy in determining layer thickness, particularly for multi-material stacks.
The study successfully characterized a complex three-element spiral nanostructure.

Conclusions:

Lensless imaging techniques combined with HHG sources provide a nondestructive method for detailed nanostructure analysis.
Accurate determination of material composition and layer thicknesses is achievable for complex nanostructured samples.
Ptychography offers enhanced accuracy for layer thickness measurements in multi-material systems.