Scanned SQUID microscope with high-speed electrical connectivity

We report on a scanned superconducting quantum interference device (SQUID) microscope operating in a cryogen-free cryostat, with the capability of up to forty RF connections with 20 GHz bandwidth to a device under test. The system utilizes planar gradiometric DC SQUIDs, which are fully shielded except for a pair of pickup coils with radii as small as 250 nm and have on-chip field coils allowing for susceptometry. The system noise is 1.3 μΦ0/Hz at the base temperature of 3.3 K. The sample temperature is variable, and both magnetometry and susceptibility measurements are simultaneously possible with the sample temperature above 40 K. Through the use of a cryogenic chip socket and silicon interposer, round-trip RF losses to a sample are ∼15 dB at 20 GHz. A combination of both active and passive magnetic shielding results in a residual magnetic field of less than 100 nT at the sample location.