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Updated: Jan 29, 2026

Fused Filament Fabrication FFF of Metal-Ceramic Components
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Fused Filament Fabrication FFF of Metal-Ceramic Components

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Micro-Hotplate for Thermocatalytic Gas Sensor Fabricated by Ceramic Laser Micromachining

Nikolay Samotaev1, Gennady Zebrev1, Konstantin Oblov1

  • 1Micro- and Nanoelectronics Department, National Research Nuclear University MEPhI (Moscow Engineering Physics Institute), 115409 Moscow, Russia.

Micromachines
|January 28, 2026
PubMed

Keywords:
LELceramicslaser micromachiningthermocatalytic sensor

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