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Resolving complex subwavelength grating structures using topologically structured light
Optics Express
|February 20, 2026
Summary
Harnessing phase singularities in structured light enhances nanoscale imaging precision. This technique improves resolution for feature sizes down to λ/10.5, surpassing traditional methods.
Area of Science:
- Optics and Photonics
- Nanotechnology
- Microscopy
Background:
- Phase singularities in structured light offer enhanced measurement precision for nanoscale objects.
- Exploiting local intensity and phase variations in incident light fields is key to improving resolution.
Purpose of the Study:
- To extend the advantages of phase singularities in structured light to imaging applications.
- To demonstrate improved resolution in nanoscale imaging using superoscillatory illumination.
Main Methods:
- Analyzing scattering patterns from binary gratings under superoscillatory illumination.
- Utilizing single-shot and positionally-displaced few-shot measurements.
- Comparing resolution achieved with structured light versus plane wave illumination.
Main Results:
- Feature sizes down to approximately λ/6.6 were resolved in single-shot measurements.
- Resolution improved to approximately λ/10.5 in few-shot measurements.
- Structured light imaging outperformed plane wave illumination, especially in few-shot scenarios.
Conclusions:
- Superoscillatory illumination with phase singularities significantly enhances nanoscale imaging resolution.
- The technique shows promise for resolving subwavelength features beyond the diffraction limit.
- Interference effects in complex objects can further improve resolution, offering new imaging possibilities.
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