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Updated: Feb 28, 2026

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators
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A Low-Noise MEMS Accelerometer Based on a Symmetrical Sandwich Capacitor Structure

Zihan Wang1,2, Chaowei Si3, Jihua Zhang1,2

  • 1School of Integrated Circuit Science and Engineering, University of Electronic Science and Technology of China, Chengdu 610054, China.

Micromachines
|February 27, 2026
PubMed

Keywords:
MEMS accelerometeranodic bondinglow noise

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