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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

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Accurate Lens-Distortion Measurement Through Detector Nyquist Sampling.

Yongqiang Yang^1,2, Zhiyi Wang¹, Junlin Li¹

¹Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China.

Sensors (Basel, Switzerland)

|March 14, 2026

Summary

This summary is machine-generated.

This study introduces a novel lens distortion testing method using Nyquist sampling. It achieves high-precision distortion measurements for industrial imaging lenses with excellent accuracy.

Keywords:

Nyquist sampling distortion fringe pattern phase shift

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Area of Science:

Optical Engineering
Image Metrology
Lens Characterization

Background:

Lens distortion significantly impacts imaging performance.
Accurate distortion measurement is crucial for industrial applications.
Existing methods may lack precision or resolution.

Purpose of the Study:

To develop a high-precision lens distortion testing method.
To enable accurate measurement of distortion distribution.
To evaluate conventional industrial imaging lenses.

Main Methods:

Utilizing detector Nyquist sampling of image data.
Analyzing Moiré fringe patterns under Nyquist sampling conditions.
Applying phase-shift algorithms and distortion formulas.

Main Results:

Achieved high testing accuracy and sampling resolution.
Demonstrated a consistent linear trend in image-plane distortion.
Obtained magnification deviation factor repeatability of ±108 nm/cm.
Achieved third-order distortion measurement accuracy of ±108 nm/cm³.

Conclusions:

The proposed Nyquist sampling method offers high-precision distortion evaluation.
This technique is suitable for conventional industrial imaging lenses.
The method provides reliable and accurate lens distortion data.