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Updated: Mar 29, 2026

Aerosol-assisted Chemical Vapor Deposition of Metal Oxide Structures: Zinc Oxide Rods
Published on: September 14, 2017
Electrospun Amorphous Indium Gallium Zinc Oxide (IGZO) Nanofibers for Highly Selective H2S Gas Sensing
Anh-Duy Nguyen1, Sung Tae Lim1, Jong Heon Kim1
1Department of Materials Science and Engineering, Inha University, Incheon 22212, Republic of Korea.
Abstract:
As a ternary metal oxide, indium gallium zinc oxide (IGZO) has gathered much attention for various applications, including gas sensors, due to its remarkable semiconducting properties, even in amorphous phases and at a low process temperature. For gas sensing applications, as surface area is an important factor affecting the response and performance of a gas sensor, nanofibers (NFs) with 1D morphology are expected to have good sensing performance. In this research, IGZO NFs were synthesized using an electrospinning process, which is a suitable technique for the large-scale and low-cost fabrication of NFs. Various characterizations were performed on the synthesized IGZO NFs, and the desired NF morphology and chemical composition were confirmed. Gas sensing experiments showed that the sensor was sensitive and selective to H2S gas at 250 °C with a response of 40.5 to 100 ppm gas. This study demonstrates the strong potential of IGZO for use in sensitive and selective H2S gas sensors.
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