EDX Array Tomography: 3D Imaging With Chemical Sensitivity and Submicron Resolution Through Ultramicrotomy and

David McLaughlin1,2, Markus Bierling1,2, Colin P O'Brien3

  • 1Helmholtz Institute Erlangen-Nürnberg for Renewable Energy (IET-2), Forschungszentrum Jülich, Cauerstr. 1, 91058 Erlangen, Germany.

Summary

We developed energy-dispersive X-ray spectroscopy (EDX) array tomography for advanced 3D imaging of multiphase materials. This technique overcomes depth resolution limits and charging artifacts, enabling detailed analysis of low-conductivity samples like CO2 electrolyzer components.