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Array Tomography Workflow for the Targeted Acquisition of Volume Information using Scanning Electron Microscopy
Published on: July 15, 2021
EDX Array Tomography: 3D Imaging With Chemical Sensitivity and Submicron Resolution Through Ultramicrotomy and
David McLaughlin1,2, Markus Bierling1,2, Colin P O'Brien3
1Helmholtz Institute Erlangen-Nürnberg for Renewable Energy (IET-2), Forschungszentrum Jülich, Cauerstr. 1, 91058 Erlangen, Germany.
We developed energy-dispersive X-ray spectroscopy (EDX) array tomography for advanced 3D imaging of multiphase materials. This technique overcomes depth resolution limits and charging artifacts, enabling detailed analysis of low-conductivity samples like CO2 electrolyzer components.
Area of Science:
- Materials Science
- Analytical Chemistry
- Nanotechnology
Background:
- Energy-dispersive X-ray spectroscopy (EDX) offers elemental contrast but lacks depth resolution for 3D imaging.
- Conventional EDX is limited to conductive samples, hindering analysis of multiphase materials with complex geometries.
- Existing methods struggle with depth limitations and charging artifacts in non-conductive samples.
Purpose of the Study:
- To develop a novel tomographic imaging method for multiphase samples using EDX.
- To overcome the limitations of conventional EDX in depth resolution and sample conductivity.
- To enable submicron resolution 3D analysis of polymer-containing multiphase materials for energy applications.
Main Methods:
- Adaptation of array tomography using an automated tape-collecting ultramicrotome (ATUMtome).
- Integration of scanning electron microscopy with EDX mapping for elemental analysis of serial sections.
- Surface coating of sections to mitigate charging artifacts during imaging.
Main Results:
- Achieved submicron resolution tomographic imaging of polymer-containing multiphase samples.
- Successfully imaged a multiphase microporous layer in a CO2 electrolyzer gas diffusion electrode.
- Overcame depth resolution limitations inherent in traditional EDX surface mapping.
- Mitigated charging artifacts on low-conductivity samples through surface coating.
Conclusions:
- EDX array tomography provides a powerful new approach for 3D elemental analysis of challenging materials.
- The technique is particularly valuable for analyzing complex multiphase samples in energy materials research.
- This method enables detailed digital modeling of components like CO2 electrolyzer electrodes, previously unachievable.
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