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Mechanism discrimination in multilevel RRAM using state-resolved impedance evolution
Sangwoo Jung1, Hyoseob Kim1, Kyungho Hong2
1Department of Intelligent Semiconductor Engineering, Chung-Ang University, Seoul, 06974, Republic of Korea. minhwi@cau.ac.kr.
Materials Horizons
|August 10, 2026
Summary
This study uses impedance analysis to differentiate between filamentary and interfacial switching in multilevel Resistive Random Access Memory (RRAM) devices. The findings offer a practical method for analyzing and distinguishing RRAM switching mechanisms.
Area of Science:
- Materials Science
- Electrical Engineering
- Semiconductor Device Physics
Background:
- Multilevel operation in Resistive Random Access Memory (RRAM) necessitates reliable discrimination between distinct switching mechanisms.
- Different switching pathways in RRAM lead to varied state evolution and frequency responses, complicating device analysis.
Purpose of the Study:
- To employ state-resolved impedance evolution for analyzing and distinguishing filamentary-type and interfacial-type RRAM devices.
- To systematically examine the evolution of resistive and capacitive contributions across multiple programmed resistance states.
- To link impedance spectra changes to underlying physical switching mechanisms.
Main Methods:
- Tracking impedance spectra at each programmed resistance state in RRAM devices.
- Utilizing Nyquist and Bode analyses to characterize state-dependent impedance responses.
- Constructing and implementing equivalent circuit models in SPICE to simulate and validate experimental findings.
Main Results:
- State-resolved impedance evolution clearly differentiates between filamentary and interfacial switching mechanisms.
- Resistive and capacitive contributions show distinct evolutionary patterns linked to the switching type.
- SPICE simulations successfully reproduced measured impedance trends and validated physical mechanism interpretations.
Conclusions:
- State-resolved impedance evolution provides a practical framework for mechanism analysis in multilevel RRAM.
- This approach enables reliable discrimination between filamentary and interfacial switching behaviors.
- The combined experimental and modeling strategy offers robust insights into RRAM device physics.