Controlled-depth and cross-section preparation techniques for transmission electron microscopy subsurface studies in metals
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Updated: Nov 7, 2026

Preparation and Observation of Thick Biological Samples by Scanning Transmission Electron Tomography
Published on: March 12, 2017
A Garcia-Borquez1, W Kesternich
1Institut für Festkörperforschung, Forschungszentrum Jülich, Germany.
Abstract:
Thin film specimen preparation from bulk material at a controlled depth below the surface and cross-section thin film preparation for transmission electron microscope investigations of electrically conducting materials are described. Both techniques are illustrated by austenitic stainless steel, where they have been used complementary to each other for microstructural studies of subsurface ion irradiation damage. The advantages and limitations of both techniques are discussed.
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