(110) HREM of interfacial structures in semiconductor hetero-structures

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Electron Channeling Contrast Imaging for Rapid III-V Heteroepitaxial Characterization
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N Ikarashi1, K Ishida

  • 1Microelectronics Research Laboratories, NEC Corporation, Tsukuba, Japan.

Microscopy Research and Technique
|March 28, 1998
PubMed

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