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Proceedings of Spie--The International Society for Optical Engineering
|
July 25, 2017
Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry
J S Villarrubia, V N Tondare, A E Vladár
Scanning
|
July 10, 2008
Simulated SEM images for resolution measurement
P Cizmar, A E Vladár, B Ming, et al.
Scanning
|
September 23, 2011
Modeling the point-spread function in helium-ion lithography
Donald Winston, J Ferrera, L Battistella, et al.
Scanning
|
October 6, 2001
Application of the low-loss scanning electron microscope image to integrated circuit technology. Part 1--Applications to accurate dimension measurements
M T Postek, A E Vladár, O C Wells, et al.
APL Materials
|
April 16, 2019
Electron beam-based metrology after CMOS
J A Liddle, B D Hoskins, A E Vladár, et al.
Scanning
|
January 5, 2002
Application of the low-loss scanning electron microscope image to integrated circuit technology part II--chemically-mechanically planarized samples
O C Wells, M McGlashan-Powell, A E Vladár, et al.
Scanning
|
September 14, 1999
Image sharpness measurement in the scanning electron-microscope--part III
N F Zhang, M T Postek, R D Larrabee, et al.
Ultramicroscopy
|
March 10, 2015
Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library
J S Villarrubia, A E Vladár, B Ming, et al.
Page
of 1
Search research articles
Search
Showing results (1-10 of 8) with videos related to
Sort By:
Page
of 1
Proceedings of Spie--The International Society for Optical Engineering
|
July 25, 2017
Virtual rough samples to test 3D nanometer-scale scanning electron microscopy stereo photogrammetry
J S Villarrubia, V N Tondare, A E Vladár
Scanning
|
July 10, 2008
Simulated SEM images for resolution measurement
P Cizmar, A E Vladár, B Ming, et al.
Scanning
|
September 23, 2011
Modeling the point-spread function in helium-ion lithography
Donald Winston, J Ferrera, L Battistella, et al.
Scanning
|
October 6, 2001
Application of the low-loss scanning electron microscope image to integrated circuit technology. Part 1--Applications to accurate dimension measurements
M T Postek, A E Vladár, O C Wells, et al.
APL Materials
|
April 16, 2019
Electron beam-based metrology after CMOS
J A Liddle, B D Hoskins, A E Vladár, et al.
Scanning
|
January 5, 2002
Application of the low-loss scanning electron microscope image to integrated circuit technology part II--chemically-mechanically planarized samples
O C Wells, M McGlashan-Powell, A E Vladár, et al.
Scanning
|
September 14, 1999
Image sharpness measurement in the scanning electron-microscope--part III
N F Zhang, M T Postek, R D Larrabee, et al.
Ultramicroscopy
|
March 10, 2015
Scanning electron microscope measurement of width and shape of 10nm patterned lines using a JMONSEL-modeled library
J S Villarrubia, A E Vladár, B Ming, et al.
Page
of 1