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Applied Spectroscopy|March 28, 2012
Quantum cascade laser-based measurement of metal alkylamide density during atomic layer depositionJames E Maslar, William A Kimes, Brent A Sperling
Journal of Research of the National Institute of Standards and Technology|December 8, 2021
Apparatus for Characterizing Gas-Phase Chemical Precursor Delivery for Thin Film Deposition ProcessesJames E Maslar, William A Kimes, Brent A Sperling
Journal of Applied Physics|June 16, 2021
Extracting electron densities in n-type GaAs from Raman spectra: Comparisons with Hall measurementsMaicol A Ochoa, James E Maslar, Herbert S Bennett
Journal of Applied Physics|May 18, 2023
GaSb band-structure models for electron density determinations from Raman measurementsMaicol A Ochoa, James E Maslar, Herbert S Bennett
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society|March 20, 2020
In situ infrared spectroscopy during La2O3 ALD using La( i PrCp)3 and H2OBrent A Sperling, James E Maslar, Sergei V Ivanov
Langmuir : the ACS Journal of Surfaces and Colloids|April 26, 2007
Adsorption behavior of DNA-wrapped carbon nanotubes on self-assembled monolayer surfacesRebecca A Zangmeister, James E Maslar, Aric Opdahl, et al.
Applied Spectroscopy|September 27, 2013
Time-resolved surface infrared spectroscopy during atomic layer depositionBrent A Sperling, John Hoang, William A Kimes, et al.
Applied Spectroscopy|February 10, 2015
Measurements of metal alkylamide density during atomic layer deposition using a mid-infrared light-emitting diode (LED) sourceJames E Maslar, John Hoang, William A Kimes, et al.
Journal of Vacuum Science & Technology. A, Vacuum, Surfaces, and Films : an Official Journal of the American Vacuum Society|July 10, 2024
Characterization of bubbler performance for low-volatility liquid precursor deliveryJames E Maslar, William A Kimes, Brent A Sperling, et al.
Applied Spectroscopy|July 15, 2017
Nondispersive Infrared Gas Analyzer for Vapor Density Measurements of a Carbonyl-Containing Organometallic Cobalt PrecursorJames E Maslar, William A Kimes, Brent A Sperling, et al.
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