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Optics Express|December 19, 2025
TFSolver: a numerical Python toolkit for parallel electromagnetic calculation of planar multilayer thin films at multi-wavelength and multi-angleShuo Liu, Xiuguo Chen, Shiyuan LiuOptics Express|June 11, 2024
Inverse optical scatterometry using sketch-guided deep learningShuo Liu, Xiuguo Chen, Tianjuan Yang, et al.Applied Optics|June 4, 2019
In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode methodZhiyong Yang, Xiuguo Chen, Hao Jiang, et al.Applied Optics|June 17, 2020
Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer functionZhiyong Yang, Xiuguo Chen, Hao Jiang, et al.Applied Optics|May 14, 2015
Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometryHonggang Gu, Shiyuan Liu, Xiuguo Chen, et al.Optics Letters|December 15, 2023
X-ray-based overlay metrology using reciprocal space slicing analysisJiahao Zhang, Xiuguo Chen, Tianjuan Yang, et al.Applied Optics|October 3, 2013
Improved measurement accuracy in optical scatterometry using correction-based library searchXiuguo Chen, Shiyuan Liu, Chuanwei Zhang, et al.Optics Express|May 15, 2020
High-speed Mueller matrix ellipsometer with microsecond temporal resolutionSong Zhang, Hao Jiang, Honggang Gu, et al.Journal of the Optical Society of America. A, Optics, Image Science, and Vision|December 15, 2017
Reduced-basis boundary element method for fast electromagnetic field computationYating Shi, Xiuguo Chen, Yinyin Tan, et al.Optics Express|October 17, 2014
Robust solution to the inverse problem in optical scatterometryJinlong Zhu, Shiyuan Liu, Xiuguo Chen, et al.Pageof 173