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Optics Letters
|
September 29, 2017
175 nm period grating fabricated by i-line proximity mask-aligner lithography
Yannick Bourgin, Daniel Voigt, Thomas Käsebier, et al.
Optics Letters
|
August 19, 2010
Highly efficient three-level blazed grating in the resonance domain
Maria Oliva, Dirk Michaelis, Tino Benkenstein, et al.
Optics Express
|
February 12, 2014
Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Marcus Trost, Sven Schröder, Angela Duparré, et al.
Optics Express
|
July 21, 2015
Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography
Yannick Bourgin, Thomas Siefke, Thomas Käsebier, et al.
Optics Express
|
November 14, 2024
Mid-infrared dielectric laser acceleration in a silicon dual pillar structure
Leon Brückner, Tomáš Chlouba, Yuya Morimoto, et al.
Optics Express
|
February 1, 2024
Structured illumination ptychography and at-wavelength characterization with an EUV diffuser at 13.5 nm wavelength
Wilhelm Eschen, Chang Liu, Michael Steinert, et al.
Optics Express
|
October 14, 2010
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, Andreas Bich, et al.
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of 3
Search research articles
Search
Showing results (21-30 of 27) with videos related to
Sort By:
Page
of 3
You have reached the last page of results.
This site can display upto 27 results.
Optics Letters
|
September 29, 2017
175 nm period grating fabricated by i-line proximity mask-aligner lithography
Yannick Bourgin, Daniel Voigt, Thomas Käsebier, et al.
Optics Letters
|
August 19, 2010
Highly efficient three-level blazed grating in the resonance domain
Maria Oliva, Dirk Michaelis, Tino Benkenstein, et al.
Optics Express
|
February 12, 2014
Structured Mo/Si multilayers for IR-suppression in laser-produced EUV light sources
Marcus Trost, Sven Schröder, Angela Duparré, et al.
Optics Express
|
July 21, 2015
Double-sided structured mask for sub-micron resolution proximity i-line mask-aligner lithography
Yannick Bourgin, Thomas Siefke, Thomas Käsebier, et al.
Optics Express
|
November 14, 2024
Mid-infrared dielectric laser acceleration in a silicon dual pillar structure
Leon Brückner, Tomáš Chlouba, Yuya Morimoto, et al.
Optics Express
|
February 1, 2024
Structured illumination ptychography and at-wavelength characterization with an EUV diffuser at 13.5 nm wavelength
Wilhelm Eschen, Chang Liu, Michael Steinert, et al.
Optics Express
|
October 14, 2010
Advanced mask aligner lithography: new illumination system
Reinhard Voelkel, Uwe Vogler, Andreas Bich, et al.
Page
of 3