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Optics Express
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December 19, 2025
TFSolver: a numerical Python toolkit for parallel electromagnetic calculation of planar multilayer thin films at multi-wavelength and multi-angle
Shuo Liu, Xiuguo Chen, Shiyuan Liu
Applied Optics
|
June 4, 2019
In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method
Zhiyong Yang, Xiuguo Chen, Hao Jiang, et al.
Applied Optics
|
June 17, 2020
Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer function
Zhiyong Yang, Xiuguo Chen, Hao Jiang, et al.
Applied Optics
|
May 14, 2015
Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry
Honggang Gu, Shiyuan Liu, Xiuguo Chen, et al.
Optics Letters
|
December 15, 2023
X-ray-based overlay metrology using reciprocal space slicing analysis
Jiahao Zhang, Xiuguo Chen, Tianjuan Yang, et al.
Applied Optics
|
October 3, 2013
Improved measurement accuracy in optical scatterometry using correction-based library search
Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, et al.
Optics Express
|
May 15, 2020
High-speed Mueller matrix ellipsometer with microsecond temporal resolution
Song Zhang, Hao Jiang, Honggang Gu, et al.
Optics Express
|
June 11, 2024
Inverse optical scatterometry using sketch-guided deep learning
Shuo Liu, Xiuguo Chen, Tianjuan Yang, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|
December 15, 2017
Reduced-basis boundary element method for fast electromagnetic field computation
Yating Shi, Xiuguo Chen, Yinyin Tan, et al.
Optics Express
|
October 17, 2014
Robust solution to the inverse problem in optical scatterometry
Jinlong Zhu, Shiyuan Liu, Xiuguo Chen, et al.
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of 5
Search research articles
Search
Showing results (1-10 of 47) with videos related to
Sort By:
Page
of 5
Optics Express
|
December 19, 2025
TFSolver: a numerical Python toolkit for parallel electromagnetic calculation of planar multilayer thin films at multi-wavelength and multi-angle
Shuo Liu, Xiuguo Chen, Shiyuan Liu
Applied Optics
|
June 4, 2019
In-line wavefront aberration adjustment of a projection lens for a lithographic tool using the dominant mode method
Zhiyong Yang, Xiuguo Chen, Hao Jiang, et al.
Applied Optics
|
June 17, 2020
Fast reconstruction of the aberrated scanning lithographic image by a quadratic imaging model and an integral transfer function
Zhiyong Yang, Xiuguo Chen, Hao Jiang, et al.
Applied Optics
|
May 14, 2015
Calibration of misalignment errors in composite waveplates using Mueller matrix ellipsometry
Honggang Gu, Shiyuan Liu, Xiuguo Chen, et al.
Optics Letters
|
December 15, 2023
X-ray-based overlay metrology using reciprocal space slicing analysis
Jiahao Zhang, Xiuguo Chen, Tianjuan Yang, et al.
Applied Optics
|
October 3, 2013
Improved measurement accuracy in optical scatterometry using correction-based library search
Xiuguo Chen, Shiyuan Liu, Chuanwei Zhang, et al.
Optics Express
|
May 15, 2020
High-speed Mueller matrix ellipsometer with microsecond temporal resolution
Song Zhang, Hao Jiang, Honggang Gu, et al.
Optics Express
|
June 11, 2024
Inverse optical scatterometry using sketch-guided deep learning
Shuo Liu, Xiuguo Chen, Tianjuan Yang, et al.
Journal of the Optical Society of America. A, Optics, Image Science, and Vision
|
December 15, 2017
Reduced-basis boundary element method for fast electromagnetic field computation
Yating Shi, Xiuguo Chen, Yinyin Tan, et al.
Optics Express
|
October 17, 2014
Robust solution to the inverse problem in optical scatterometry
Jinlong Zhu, Shiyuan Liu, Xiuguo Chen, et al.
Page
of 5