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Applied Optics
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October 18, 2022
Aberration analysis and compensate method of a BP neural network and sparrow search algorithm in deep ultraviolet lithography
Shuang Zhang, Libin Zhang, Tianyang Gai, et al.
Optics Express
|
September 23, 2025
Aberration model in extreme ultraviolet lithography for device reliability
Jiashuo Wang, Xiaojing Su, Xin Hong, et al.
Applied Optics
|
September 14, 2023
Fast diffraction model of an EUV mask based on asymmetric patch data fitting
Ziqi Li, Xuyu Jing, Lisong Dong, et al.
Optics Express
|
March 18, 2026
Suppressing mask 3D effects in plasmonic lithography via a single high-k wavevector interference
Chuang Wu, Yihua Zhu, Jianfang He, et al.
Optics Express
|
November 29, 2023
Three-dimensional plasmonic lithography imaging modeling based on the RCWA algorithm for computational lithography
Huwen Ding, Taian Fan, Libin Zhang, et al.
Applied Optics
|
January 16, 2024
Mask correction method for surface plasmon lithography
Le Ma, Libin Zhang, Jianfang He, et al.
The Journal of Physical Chemistry Letters
|
August 19, 2024
Convolutional Neural Network-Assisted Photoresist Formulation Discriminator Design of a Contact Layer for Electron Beam Lithography
Rongbo Zhao, Yayi Wei, Xiaolin Wang, et al.
Applied Optics
|
August 14, 2020
Analysis and modulation of aberration in an extreme ultraviolet lithography projector via rigorous simulation and a back propagation neural network
Rongbo Zhao, Lisong Dong, Chunyue Bo, et al.
Micromachines
|
November 27, 2025
Analysis of Dynamic Stability Control of Light Source in Immersion DUV Lithography
Yihua Zhu, Dandan Han, Chuang Wu, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Page
of 7
Search research articles
Search
Showing results (21-30 of 61) with videos related to
Sort By:
Page
of 7
Applied Optics
|
October 18, 2022
Aberration analysis and compensate method of a BP neural network and sparrow search algorithm in deep ultraviolet lithography
Shuang Zhang, Libin Zhang, Tianyang Gai, et al.
Optics Express
|
September 23, 2025
Aberration model in extreme ultraviolet lithography for device reliability
Jiashuo Wang, Xiaojing Su, Xin Hong, et al.
Applied Optics
|
September 14, 2023
Fast diffraction model of an EUV mask based on asymmetric patch data fitting
Ziqi Li, Xuyu Jing, Lisong Dong, et al.
Optics Express
|
March 18, 2026
Suppressing mask 3D effects in plasmonic lithography via a single high-k wavevector interference
Chuang Wu, Yihua Zhu, Jianfang He, et al.
Optics Express
|
November 29, 2023
Three-dimensional plasmonic lithography imaging modeling based on the RCWA algorithm for computational lithography
Huwen Ding, Taian Fan, Libin Zhang, et al.
Applied Optics
|
January 16, 2024
Mask correction method for surface plasmon lithography
Le Ma, Libin Zhang, Jianfang He, et al.
The Journal of Physical Chemistry Letters
|
August 19, 2024
Convolutional Neural Network-Assisted Photoresist Formulation Discriminator Design of a Contact Layer for Electron Beam Lithography
Rongbo Zhao, Yayi Wei, Xiaolin Wang, et al.
Applied Optics
|
August 14, 2020
Analysis and modulation of aberration in an extreme ultraviolet lithography projector via rigorous simulation and a back propagation neural network
Rongbo Zhao, Lisong Dong, Chunyue Bo, et al.
Micromachines
|
November 27, 2025
Analysis of Dynamic Stability Control of Light Source in Immersion DUV Lithography
Yihua Zhu, Dandan Han, Chuang Wu, et al.
Optics Express
|
July 30, 2025
Impact of mask errors on imaging quality in surface plasmon lithography
Dinghai Rui, LiBin Zhang, Yayi Wei, et al.
Page
of 7