Adriaan J M Mackus

13PUBLICATIONS
27CO-AUTHORS
Elemental semiconductorsChemical and thermal processes in energy and combustionStructure and dynamics of materialsCatalysis and mechanisms of reactionsSolid state chemistry
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Publications (13)

|Jun 03, 2026
AdsorPy: A Python Package for Lattice-Based Random Sequential Adsorption Simulations.

|Jul 28, 2025
Area-Selective Atomic Layer Deposition through Selective Passivation of SiO2 with a SF6/H2 Plasma.

Olaf C A Bolkenbaas, Marc J M Merkx, Nicholas J Chittock

|Nov 25, 2024
Investigation of the atomic layer etching mechanism for Al2O3 using hexafluoroacetylacetone and H2 plasma.

Nicholas J Chittock, Joost F W Maas, Ilker Tezsevin

|Jul 16, 2024
The Consequences of Random Sequential Adsorption for the Precursor Packing and Growth-Per-Cycle of Atomic Layer Deposition Processes.

I Tezsevin, J H Deijkers, M J M Merkx

|May 22, 2024
In situ formation of inhibitor species through catalytic surface reactions during area-selective atomic layer deposition of TaN.

Marc J M Merkx, Ilker Tezsevin, Pengmei Yu

|Mar 15, 2023
Computational Investigation of Precursor Blocking during Area-Selective Atomic Layer Deposition Using Aniline as a Small-Molecule Inhibitor.

I Tezsevin, J F W Maas, M J M Merkx

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Frequent Collaborators

11 joint publications

Wilhelmus M M Kessels

8 joint publications

Marc J M Merkx

6 joint publications

Ilker Tezsevin

6 joint publications

Tania E Sandoval