Sijun Kim

13PUBLICATIONS
9CO-AUTHORS
Catalysis and mechanisms of reactionsChemical and thermal processes in energy and combustionPlasma physics; fusion plasmas; electrical dischargesEngineering electromagneticsWater treatment processes
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Publications (13)

|Sep 09, 2023
Enhancement of Ar Ion Flux on the Substrate by Heterogeneous Charge Transfer Collision of Ar Atom with He Ion in an Inductively Coupled Ar/He Plasma.

Inho Seong, Sijun Kim, Minsu Choi

|May 27, 2023
Contribution of Ion Energy and Flux on High-Aspect Ratio SiO2 Etching Characteristics in a Dual-Frequency Capacitively Coupled Ar/C4F8 Plasma: Individual Ion Energy and Flux Controlled.

Wonnyoung Jeong, Sijun Kim, Youngseok Lee

|Apr 28, 2023
On the Quenching of Electron Temperature in Inductively Coupled Plasma.

Inho Seong, Si-Jun Kim, Youngseok Lee

|Apr 13, 2023
Determination of Plasma Potential Using an Emissive Probe with Floating Potential Method.

Chulhee Cho, Sijun Kim, Youngseok Lee

|Mar 11, 2023
Development of the Tele-Measurement of Plasma Uniformity via Surface Wave Information (TUSI) Probe for Non-Invasive In-Situ Monitoring of Electron Density Uniformity in Plasma Display Fabrication Process.

Si-Jun Kim, Min-Su Choi, Sang-Ho Lee

|Nov 26, 2022
Characterization of an Etch Profile at a Wafer Edge in Capacitively Coupled Plasma.

Inho Seong, Jinho Lee, Sijun Kim

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Frequent Collaborators

12 joint publications

Youngseok Lee

10 joint publications

Inho Seong

10 joint publications

Chulhee Cho

9 joint publications

Shinjae You