Chi Thang Nguyen

3PUBLICATIONS
13CO-AUTHORS
Autonomous agents and multiagent systemsCatalysis and mechanisms of reactions
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Publications (3)

|May 21, 2026
Design and performance of AI agents interfacing with an atomic layer deposition tool.

|Jun 08, 2022
Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al2O3 with a Series of Al(CH3)Cl3- and Al(CH2)3 Precursors.

Il-Kwon Oh, Tania E Sandoval, Tzu-Ling Liu

|Nov 25, 2021
Growth modulation of atomic layer deposition of HfO2 by combinations of H2O and O3 reactants.

Byeong Guk Ko, Chi Thang Nguyen, Bonwook Gu

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Frequent Collaborators

2 joint publications

Han-Bo-Ram Lee

1 joint publications

Jungwon Park

1 joint publications

Bonggeun Shong

1 joint publications

Il-Kwon Oh