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Chi Thang Nguyen

3PUBLICATIONS

13CO-AUTHORS

Autonomous agents and multiagent systemsCatalysis and mechanisms of reactions

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Publications (3)

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|May 21, 2026

Design and performance of AI agents interfacing with an atomic layer deposition tool.

|Jun 08, 2022

Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> with a Series of Al(CH<sub>3</sub>)<sub></sub>Cl<sub>3-</sub> and Al(C<sub></sub>H<sub>2</sub>)<sub>3</sub> Precursors.

Il-Kwon Oh, Tania E Sandoval, Tzu-Ling Liu

|Nov 25, 2021

Growth modulation of atomic layer deposition of HfO<sub>2</sub> by combinations of H<sub>2</sub>O and O<sub>3</sub> reactants.

Byeong Guk Ko, Chi Thang Nguyen, Bonwook Gu

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Frequent Collaborators

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Han-Bo-Ram Lee

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Jungwon Park

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Bonggeun Shong

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Il-Kwon Oh

1 joint publications

Tania E Sandoval

1 joint publications

Tzu-Ling Liu

1 joint publications

Nathaniel E Richey

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Ralf Tonner-Zech

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Stacey F Bent

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Angel Yanguas-Gil

Frequent Collaborators

2 joint publications

Han-Bo-Ram Lee

1 joint publications

Jungwon Park

1 joint publications

Bonggeun Shong

1 joint publications

Il-Kwon Oh