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Nathaniel E Richey

2PUBLICATIONS

9CO-AUTHORS

Catalysis and mechanisms of reactionsElectrical circuits and systems

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Publications (2)

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|Jun 08, 2022

Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al<sub>2</sub>O<sub>3</sub> with a Series of Al(CH<sub>3</sub>)<sub></sub>Cl<sub>3-</sub> and Al(C<sub></sub>H<sub>2</sub>)<sub>3</sub> Precursors.

Il-Kwon Oh, Tania E Sandoval, Tzu-Ling Liu

|Jun 02, 2022

Molecular Layer Deposition of a Hafnium-Based Hybrid Thin Film as an Electron Beam Resist.

Jingwei Shi, Ajay Ravi, Nathaniel E Richey

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Frequent Collaborators

2 joint publications

Stacey F Bent

1 joint publications

Jingwei Shi

1 joint publications

Huaxin Gong

1 joint publications

Il-Kwon Oh

1 joint publications

Tania E Sandoval

1 joint publications

Tzu-Ling Liu

1 joint publications

Chi Thang Nguyen

1 joint publications

Han-Bo-Ram Lee

1 joint publications

Ralf Tonner-Zech

Frequent Collaborators

2 joint publications

Stacey F Bent

1 joint publications

Jingwei Shi

1 joint publications

Huaxin Gong

1 joint publications

Il-Kwon Oh

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