Nathaniel E Richey

2PUBLICATIONS
9CO-AUTHORS
Catalysis and mechanisms of reactionsElectrical circuits and systems
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Publications (2)

|Jun 08, 2022
Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al2O3 with a Series of Al(CH3)Cl3- and Al(CH2)3 Precursors.

Il-Kwon Oh, Tania E Sandoval, Tzu-Ling Liu

|Jun 02, 2022
Molecular Layer Deposition of a Hafnium-Based Hybrid Thin Film as an Electron Beam Resist.

Jingwei Shi, Ajay Ravi, Nathaniel E Richey

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Frequent Collaborators

2 joint publications

Stacey F Bent

1 joint publications

Jingwei Shi

1 joint publications

Huaxin Gong

1 joint publications

Il-Kwon Oh