Tzu-Ling Liu

6PUBLICATIONS
13CO-AUTHORS
Elemental semiconductorsCatalysis and mechanisms of reactionsInorganic materials (incl. nanomaterials)Electrical circuits and systems
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Publications (6)

|Aug 20, 2025
Role of Precursor Miscibility in Area-Selective Atomic Layer Deposition.

Alexander Shearer, Yukio Cho, Andreas Werbrouck

|Jan 03, 2025
Nanostructure fabrication by area selective deposition: a brief review.

Tzu-Ling Liu, Stacey F Bent

|Jun 08, 2022
Elucidating the Reaction Mechanism of Atomic Layer Deposition of Al2O3 with a Series of Al(CH3)Cl3- and Al(CH2)3 Precursors.

Il-Kwon Oh, Tania E Sandoval, Tzu-Ling Liu

|Sep 22, 2021
Characterizing Self-Assembled Monolayer Breakdown in Area-Selective Atomic Layer Deposition.

Tzu-Ling Liu, Li Zeng, Katie L Nardi

|Aug 19, 2020
Effect of Multilayer versus Monolayer Dodecanethiol on Selectivity and Pattern Integrity in Area-Selective Atomic Layer Deposition.

Tzu-Ling Liu, Katie L Nardi, Nerissa Draeger

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