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Yi Sun

1PUBLICATIONS

2CO-AUTHORS

Microelectronics

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Publications (1)

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|Mar 10, 2026

AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder.

Fang Wang, Hao Yu, Yechen Miao

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Fang Wang

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Heng Yang

Frequent Collaborators

1 joint publications

Fang Wang

1 joint publications

Heng Yang

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