Fang Wang
1PUBLICATIONS
2CO-AUTHORS
Get your video featured.
Publish with JoVEGet your video featured.
Publish with JoVE
Publications (1)
Sort by Publication Date:
|Mar 10, 2026
AI-driven feature recognition of SEM profiles in deep reactive ion etching based on physics-constrained variational autoencoder.Fang Wang, Hao Yu, Yechen Miao
Pageof 1
