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结构在真空中准束状态在连续元表面深度下波长纳米结构计量学
Falco Bijloo1,2, Arie J den Boef1,3,4, Peter M Kraus1,3
1Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands.
ACS nano
|September 2, 2025
概括
介电超表面允许使用Fano线形精确测量亚波长特征. 这种光学方法为半导体的关键维度计量提供了高分辨率.
科学领域:
- 光学和光学
- 超材料
- 纳米技术
背景情况:
- 介电超表面表现出对几何变化敏感的法诺线形状.
- 准结合状态在连续的共振是这种灵敏度的关键.
研究的目的:
- 开发一种用于测量深度亚波长特征大小的光学方法.
- 评估介电元面在半导体关键维度计量方面的潜力.
主要方法:
- 模拟和实验分析具有不同空隙填充的介电磁盘孔元表面.
- 使用Fano线形变化推断特征尺寸的变化.
- 作为一个有效的索引传感器.
主要成果:
- 每 1 nm 临界维度变化达到 40. 5 nm 的共振波长变化.
- 光线宽为1.8纳米.
- 超表面的感应灵敏度为262 nm·RIU-1和功效值为146 RIU-1.
结论:
- 基于metasurface的Fano共振为波长测量提供了高分辨率的光学方法.
- 该技术为半导体制造中的关键维度测量提供了扫描电子显微镜的高通量替代方案.
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