Falco Bijloo1,2, Arie J den Boef1,3,4, Peter M Kraus1,3

  • 1Advanced Research Center for Nanolithography, Science Park 106, 1098 XG Amsterdam, The Netherlands.

ACS nano
|September 2, 2025
PubMed
概括

介电超表面允许使用Fano线形精确测量亚波长特征. 这种光学方法为半导体的关键维度计量提供了高分辨率.