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Thickness measurements with electron energy loss spectroscopy
K Iakoubovskii1, K Mitsuishi, Y Nakayama
1Quantum Dot Research Center, National Institute for Materials Science, Tsukuba 305-0005, Japan. iakoubovskii.konstantin@nims.go.jp
Microscopy Research and Technique
|May 6, 2008
Summary
Electron energy loss spectroscopy (EELS) thickness measurements are refined. A new scaling law for electron scattering mean free path in solids was discovered, improving EELS data analysis accuracy and ease.
Area of Science:
- Materials Science
- Condensed Matter Physics
- Spectroscopy
Background:
- Electron energy loss spectroscopy (EELS) is a powerful technique for material analysis.
- Accurate thickness measurements using EELS are crucial for material characterization.
- Current EELS data analysis methods have limitations in accuracy and ease of use.
Purpose of the Study:
- To revise and improve thickness measurement techniques using EELS.
- To develop a more accurate and user-friendly method for EELS data analysis.
- To investigate the relationship between the mean free path of inelastic electron scattering and material properties.
Main Methods:
- Utilized the Kramers-Kronig sum method for absolute thickness determination.
- Employed the log-ratio method for simplified EELS data analysis.
- Measured the mean free path of inelastic electron scattering (lambda) across various solids.
- Investigated the dependence of EELS measurements on excitation and collection angles experimentally and theoretically.
Main Results:
- Established the Kramers-Kronig sum method for quick and accurate absolute thickness measurements.
- Revealed a scaling law: lambda is approximately proportional to rho(-0.3), where rho is mass density.
- Developed an efficient model to account for the dependence of EELS measurements on angles.
- Demonstrated that the log-ratio method, when calibrated with the derived mean free path, simplifies EELS analysis.
Conclusions:
- The Kramers-Kronig sum method offers a reliable approach for absolute EELS thickness determination.
- The discovered scaling law for the mean free path provides a predictive tool for EELS analysis in diverse solids.
- The developed angular dependence model enhances the precision of EELS measurements.
- These advancements collectively simplify and improve the accuracy of EELS-based material thickness analysis.
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