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Updated: Jun 27, 2026
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Atomic Force Microscopy Cantilever-Based Nanoindentation: Mechanical Property Measurements at the Nanoscale in Air and Fluid
Published on: December 2, 2022
SI traceable calibration of an instrumented indentation sensor spring constant using electrostatic force.
Koo-Hyun Chung1, Stefan Scholz, Gordon A Shaw
1Manufacturing Engineering Laboratory, National Institute of Standards and Technology, Gaithersburg, Maryland 20899, USA.
The Review of Scientific Instruments
|December 3, 2008
Summary
We developed a new electrostatic method to create traceable reference forces for calibrating sensitive instruments like atomic force microscopes. This technique offers precise force generation, even at the piconewton level, surpassing traditional methods.
Area of Science:
- Metrology
- Nanotechnology
- Electrical Engineering
Background:
- Accurate force calibration is crucial for precision instruments.
- Existing methods for generating small, traceable forces have limitations.
Purpose of the Study:
- To present a novel measurement scheme for creating electrostatic forces traceable to the International System of Units.
- To enable calibration of force sensitivity in instrumented indentation machines and atomic force microscopes.
Main Methods:
- Utilized a sphere-plane electrode configuration to generate electrostatic forces.
- Expressed forces in terms of voltage, length, and capacitance.
- Compared electrostatic forces with mechanical forces (deadweights, reference sensor).
- Measured sensor deflection using interferometry to determine spring constant.
Main Results:
- Generated reference forces between 10 and 200 muN with approximately 1% relative standard uncertainty.
- Demonstrated the scalability of the electrostatic technique.
- Showcased potential for generating forces down to a few hundred piconewtons.
Conclusions:
- The electrostatic method provides a traceable and scalable approach for force calibration.
- This technique can achieve force ranges unattainable by current deadweight methods.
- Offers a promising pathway for advancing precision measurements in nanotechnology and materials science.
