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Updated: Jun 25, 2026

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities
Published on: November 30, 2012
Capacitor-embedded 0.54 pJ/bit silicon-slot photonic crystal waveguide modulator.
Xiaonan Chen1, Yun-Sheng Chen, Yang Zhao
1Microelectronics Research Center, Department of Electrical and Computer Engineering, The University of Texas at Austin, Austin, TX 78758, USA.
This study presents a compact silicon modulator that achieves low power consumption and high modulation efficiency. The device utilizes a novel capacitor layout and photonic crystal waveguides for improved performance in optical communications.
Area of Science:
- Photonics
- Optical Communications
- Semiconductor Devices
Background:
- Silicon photonics is crucial for high-speed optical communication systems.
- Modulators are key components in transmitting optical signals.
- Reducing power consumption and increasing efficiency in modulators are ongoing challenges.
Purpose of the Study:
- To demonstrate a high-speed, compact silicon modulator with low power consumption.
- To improve modulation efficiency using a novel capacitor layout and photonic crystal waveguides.
- To achieve a low V(pi)L figure of merit for enhanced performance.
Main Methods:
- Experimental demonstration of a silicon modulator utilizing a lateral capacitor configuration.
- Implementation of a capacitor layout to minimize total modulator capacitance.
- Exploitation of slow group velocity in slot photonic crystal waveguides.
Main Results:
- Achieved a low modulator capacitance of 30x10(-15) F.
- Demonstrated low radiofrequency (RF) power consumption of 0.54 pJ/bit.
- Obtained a V(pi)L figure of merit of 0.18 Vcm at 1548 nm, indicating high modulation efficiency.
Conclusions:
- The developed silicon modulator offers significant advantages in terms of power consumption and modulation efficiency.
- The device design is suitable for next-generation high-speed optical communication systems.
- The integration of lateral capacitor configuration and photonic crystal waveguides proves effective for modulator performance enhancement.
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