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Updated: Jun 24, 2026

10:32
Fabrication Process of Silicone-based Dielectric Elastomer Actuators
Published on: February 1, 2016
Variable phase retarder made of a dielectric elastomer actuator.
Markus Beck1, Reto Fiolka, Andreas Stemmer
1Nanotechnology Group, Department of Mechanical and Process Engineering, ETH Zurich, Zurich, Switzerland.
Optics Letters
|March 14, 2009
Summary
We developed an electrically tunable optical phase retarder using a soft polymer actuator. This inexpensive device offers a large tuning range, high accuracy, and polarization insensitivity for optical applications.
Area of Science:
- Optoelectronics
- Materials Science
- Photonics
Background:
- Optical phase retarders are crucial components in various photonic systems.
- Existing tunable retarders often face limitations in tuning range, accuracy, or cost.
Purpose of the Study:
- To introduce a novel, electrically tunable polymeric optical phase retarder.
- To demonstrate its performance characteristics and potential for diverse applications.
Main Methods:
- Fabrication of a phase retarder using a dielectric elastomer actuator and polymer materials.
- Characterization of tuning range, optical path length accuracy, drift rate, polarization sensitivity, wavefront distortion, and power density tolerance.
- Demonstration of periodic phase modulation and phase stepping techniques.
Main Results:
- Achieved a large tuning range of 14π at 488 nm.
- Exhibited high optical path length accuracy and a low drift rate of 8.3 nm/min.
- Demonstrated polarization insensitivity, wavefront distortion < λ/30, and high power density tolerance (>141 kW/cm²).
Conclusions:
- The developed polymeric phase retarder is a cost-effective, easily fabricated, and adaptable solution.
- Its performance metrics make it suitable for advanced optical modulation and phase stepping applications.
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