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Variable angle of incidence spectroscopic autocollimating ellipsometer
Lionel R Watkins1, Sophie S Shamailov
1Department of Physics, University of Auckland P.B. 92019, Auckland, New Zealand. l.watkins@auckland.ac.nz
Applied Optics
|June 3, 2010
Summary
A new spectroscopic ellipsometer allows measurements at any angle of incidence. This instrument, using a Soleil-Babinet compensator, accurately determines thin film properties like thickness and birefringence.
Area of Science:
- Optical Physics
- Materials Science
Background:
- Ellipsometry is a powerful technique for characterizing thin films.
- Traditional ellipsometers often have limitations in angle of incidence flexibility.
Purpose of the Study:
- To develop a spectroscopic ellipsometer capable of arbitrary angles of incidence.
- To enhance measurement accuracy and versatility for thin film analysis.
Main Methods:
- Utilized a spectroscopic, autocollimating ellipsometer with a Soleil-Babinet compensator.
- Employed nulling by adjusting compensator delay and polarization angle.
- Developed a calibration method for wavelength-dependent birefringence.
Main Results:
- Demonstrated accurate measurements on gold films at variable angles of incidence.
- Achieved excellent agreement with traditional null ellipsometry.
- Validated spectroscopic measurements of silicon dioxide film thickness against independent methods.
Conclusions:
- The developed ellipsometer offers versatile and accurate thin film characterization.
- The instrument is suitable for both single-wavelength and spectroscopic analyses.
- This technology advances optical metrology for materials research.
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