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Updated: May 31, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
Published on: June 13, 2023
M D Vaudin1, G Stan, Y B Gerbig
1Ceramics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. mark.vaudin@nist.gov
Surface morphology around wedge indentations in silicon was measured using electron backscattered diffraction (EBSD) and atomic force microscopy (AFM). Both methods accurately mapped surface uplift, validating elastic uplift theory for silicon.
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