Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Concept Videos

Atomic Force Microscopy01:08

Atomic Force Microscopy

Atomic force microscopy (AFM) is a type of scanning probe microscopy that can analyze topographic details of various specimens like ceramics, glass, polymers, and biological samples. AFM offers over 1000 times more resolution than the optical imaging system. Images generated from AFM are three-dimensional surface profiles, offering an advantage over the flat, two-dimensional images from other imaging techniques.
The AFM Probe
The probe is regarded as the heart of any AFM setup and comprises the...

You might also read

Related Articles

Articles linked to this work by shared authors, journal, and citation graph.

Sort by
Same author

Raman spectroscopic measurements and imaging on sub-newton Berkovich and spherical imprints in fused silica.

Journal of non-crystalline solids·2024
Same author

Controlled Indentation Flaws for the Construction of Toughness and Fatigue Master Maps.

Journal of research of the National Bureau of Standards (1977)·2021
Same author

<i>In-situ</i> Raman spectroscopic measurements of the deformation region in indented glasses.

Journal of non-crystalline solids·2020
Same author

Complications following Iliac Wing Fibrosarcoma.

Case reports in orthopedics·2019
Same author

Material Flaw Populations and Component Strength Distributions in the Context of the Weibull Function.

Experimental mechanics·2019
Same author

Rapid detection of equine infectious anaemia virus nucleic acid by insulated isothermal RT-PCR assay to aid diagnosis under field conditions.

Equine veterinary journal·2018
Same journal

Predictive drift compensation of multi-frame STEM via live scan modification.

Ultramicroscopy·2026
Same journal

Deep PACBED: Multitask analysis of PACBED images using deep neural networks.

Ultramicroscopy·2026
Same journal

Guided progressive reconstructive imaging: A new quantization-based framework for low-dose, high-throughput and real-time analytical ptychography.

Ultramicroscopy·2026
Same journal

Brightness optimization in a 200 keV DTEM source by geometry-driven aberration suppression.

Ultramicroscopy·2026
Same journal

Characterization of the Timepix4 hybrid pixel detector and its impact on four-dimensional scanning transmission electron microscopy (4D-STEM).

Ultramicroscopy·2026
Same journal

Contamination analysis of the residual gas composition in transmission electron microscopy.

Ultramicroscopy·2026
See all related articles

Related Experiment Video

Updated: May 31, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
05:04

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Published on: June 13, 2023

High resolution surface morphology measurements using EBSD cross-correlation techniques and AFM.

M D Vaudin1, G Stan, Y B Gerbig

  • 1Ceramics Division, National Institute of Standards and Technology, Gaithersburg, MD 20899, USA. mark.vaudin@nist.gov

Ultramicroscopy
|July 19, 2011
PubMed
Summary
This summary is machine-generated.

Surface morphology around wedge indentations in silicon was measured using electron backscattered diffraction (EBSD) and atomic force microscopy (AFM). Both methods accurately mapped surface uplift, validating elastic uplift theory for silicon.

More Related Videos

Quantitative Hardness Measurement by Instrumented AFM-indentation
08:21

Quantitative Hardness Measurement by Instrumented AFM-indentation

Published on: November 22, 2016

Isolation and Biophysical Study of Fruit Cuticles
15:53

Isolation and Biophysical Study of Fruit Cuticles

Published on: March 30, 2012

Related Experiment Videos

Last Updated: May 31, 2026

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection
05:04

Active Probe Atomic Force Microscopy with Quattro-Parallel Cantilever Arrays for High-Throughput Large-Scale Sample Inspection

Published on: June 13, 2023

Quantitative Hardness Measurement by Instrumented AFM-indentation
08:21

Quantitative Hardness Measurement by Instrumented AFM-indentation

Published on: November 22, 2016

Isolation and Biophysical Study of Fruit Cuticles
15:53

Isolation and Biophysical Study of Fruit Cuticles

Published on: March 30, 2012

Area of Science:

  • Materials Science
  • Solid Mechanics
  • Surface Science

Background:

  • Understanding surface deformation is crucial for micro/nano-scale material behavior.
  • Wedge indentations induce complex stress fields and surface morphology changes in crystalline materials.

Purpose of the Study:

  • To characterize the surface morphology around wedge indentations in (001) silicon.
  • To compare the efficacy of EBSD and AFM in measuring surface uplift.
  • To validate elastic uplift theory against experimental data.

Main Methods:

  • Electron Backscattered Diffraction (EBSD) for lattice displacement and rotation mapping.
  • Atomic Force Microscopy (AFM) in intermittent contact mode for high-resolution surface topography.
  • Summation of lattice rotations to quantify surface uplift via EBSD.
  • Direct height profiling across indentations.

Main Results:

  • EBSD and AFM measurements of surface uplift showed excellent agreement, within 1 nm height difference.
  • Lattice rotations measured by EBSD correlated with surface topography changes.
  • Experimental data demonstrated good agreement with predictions from elastic uplift theory.

Conclusions:

  • EBSD and AFM are reliable techniques for quantifying surface morphology and uplift in indented silicon.
  • The study validates the application of elastic uplift theory to model deformation around indentations in silicon.
  • Precise surface morphology characterization is essential for understanding mechanical behavior at the nanoscale.