Tuning fifth-order aberrations in a quadrupole-octupole corrector

Andrew R Lupini1, Stephen J Pennycook

  • 1Materials Science and Technology Division, Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA. 9az@ornl.gov

Summary

This study introduces a fifth-order aberration corrector for scanning transmission electron microscopes. This advanced corrector reduces fourth- and fifth-order aberrations, improving electron microscope resolution.

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