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Published on: January 28, 2019
Two-step phase demodulation algorithm based on the extreme value of interference.
Jian Deng1, Hankun Wang, Fengjie Zhang
1Laboratory of Nanophotonic Functional Materials and Devices, South China Normal University, Guangzhou 510006, China.
A new two-step phase demodulation algorithm precisely extracts phase information in phase-shifting interferometry. This method accurately determines both measured phase and phase shift, validated by simulations and experiments.
Area of Science:
- Optics and Photonics
- Metrology
- Signal Processing
Background:
- Phase-shifting interferometry (PSI) is a key technique for high-precision optical metrology.
- Accurate phase extraction is crucial for reliable PSI measurements.
- Existing algorithms can be sensitive to noise and require complex calculations.
Purpose of the Study:
- To develop a novel, robust algorithm for phase extraction in PSI.
- To improve the precision of measured phase and phase shift determination.
- To offer a computationally efficient method for phase demodulation.
Main Methods:
- A two-step phase demodulation algorithm utilizing maximum and minimum interference.
- Phase extraction based on the proposed algorithm.
- Validation through simulation calculations and experimental research.
Main Results:
- The proposed algorithm successfully extracts phase information with high precision.
- Both the measured phase and the phase shift were accurately determined.
- The algorithm demonstrated robustness in simulation and experimental settings.
Conclusions:
- The novel two-step phase demodulation algorithm offers a precise and reliable method for phase extraction in PSI.
- The findings are supported by both numerical simulations and experimental validation.
- This algorithm advances the capabilities of phase-shifting interferometry for metrology applications.
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