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The pulsed glow discharge as an elemental ion source.
J A Klingler1, P J Savickas, W W Harrison
1Department of Chemistry, University of Florida, 32611, Gainesville, FL, USA.
A pulsed glow discharge enhances ion signals in mass spectrometry by increasing voltage. This method allows for differentiating between sputtered and contaminant ions based on signal timing.
Area of Science:
- Analytical Chemistry
- Mass Spectrometry
- Plasma Physics
Background:
- Conventional direct current (DC) discharges are standard ion sources for quadrupole mass spectrometers.
- Pulsed glow discharges offer potential advantages over continuous wave (CW) discharges for ion generation.
Purpose of the Study:
- To investigate the use of a pulsed glow discharge as an ion source for a quadrupole mass spectrometer.
- To evaluate the impact of pulsed discharge on sputter yield and ion signal intensity.
- To explore methods for discriminating between different ion species based on their signal characteristics.
Main Methods:
- A pulsed glow discharge was employed as the ion source for a quadrupole mass spectrometer.
- Sputter yield and ion signal were measured and compared to conventional DC discharges.
- Analysis of signal irregularities, specifically rapid surges in ion signal, was performed.
- Temporal characteristics of signals for sputtered and contaminant gas species were examined.
Main Results:
- Pulsed glow discharge significantly enhances both sputter yield and ion signal compared to DC discharge.
- Increased voltage during the pulse period contributes to signal enhancement.
- Distinct temporal patterns were observed for sputtered species (post-pulse) and gaseous contaminants (beginning of pulse).
- These signal differences enable selective ion detection.
Conclusions:
- Pulsed glow discharge is an effective ion source for quadrupole mass spectrometry, offering enhanced signal intensity.
- The temporal discrimination of ion signals provides a novel method for distinguishing between sputtered and contaminant species.
- This technique allows for targeted data acquisition, improving analytical specificity.
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