Note: A stand on the basis of atomic force microscope to study substrates for imaging optics

N I Chkhalo1, N N Salashchenko1, M V Zorina1

  • 1Department of Multilayer Optics, Institute for Physics of Microstructures of the Russian Academy of Sciences, GSP-105, 603950 Nizhny Novgorod, Russia.

Summary

A new atomic force microscopy (AFM) stand precisely measures roughness on large, complex optical components. This developed system provides equivalent results to standard AFM, validating its use for optical surface analysis.